| 摘要 |
PURPOSE:To ensure reproduction of measurement of size, by forming a pattern having the same form as the present pattern on the circumferential part, and fixing the point to be measured. CONSTITUTION:In the present invention, cells 4 for size measurement having the same form as the present body are formed on the circumferential parts. Exact measuremet superior in reproductivity can be performed by executing size check using these cells 4, and reliability of size measurement is enhanced. Since the cells 4 are formed on the outside of the present pattern, a tendency of diffusion can be found easily. |
