| 摘要 |
PURPOSE:To prevent the surface of a base from the adhesion of dust by introducing gas with low dust contents to the periphery of a stack room in case of opening the stack room and loading the base to the stack room and exhausting air from the stack room to make the gas with low dust contents flow into the stack room. CONSTITUTION:When a cover 2 of the stack room 1 is opened in a clean booth 12 and an exhaust valve 4 is opened to exhaust air from an exhaust port 3, an air flow shown by arrows is generated. The air flow shows that air with low dust contents flows from the outside air into the clean booth 12 through a filter 13, flows from an aperture part whose cover 2 is opened into the stack room 1 and then is discharged from the exhaust port 3. At the loading of the base 10 into the stack room 1 in the clean booth 12, dust generated from a worker's body or the like is also carried by the air flow and discharged from the exhaust port 3. Consequently, clean air through the filter 3 is always supplied to the surface of the base 10 and the surface of the base 10 can be prevented from the adhesion of dust. |
