| 摘要 |
PURPOSE:To contemplate improvement in pressure resistance by forming panels such that a projected portion of one panel is arranged adjacent to a projected portion of the other panel by turns, fixing respective projected portions of each panel to the other panel and also fixing the whole circumferences of each panel to each other. CONSTITUTION:There are provided panels 10 and 14 which are formed with a plurality of projected portions over the entire surfaces of each panel, which is formed such that a projected portion 12 of the panel 10 is arranged adjacent to a projected portion 16 of the panel 14 by turns. The projected portions 12 and 16 of the panels 10 and 14, respectively are fixed to the other panel by welding. With this arrangement, pressure resistance may be enlarged without increasing the thickness of the cryopanel. As a result, in the case that the cryopanel is used as a cryopump, it is not required to reduce an exhaust speed, thus improving an operational performance as the cryopump. |
