| 摘要 |
PURPOSE:To obtain large photocurrent by providing a detecting electrode of a current which flows through an amorphous Si film on the opposite surface to the incident surface of the detected light of a transparent insulating substrate. CONSTITUTION:An amorphous Si film 32 is formed on the opposite surface to the incident surface of the detected light of a transparent insulating substrate 31. A film 321 is the surface of the film 32 which is deteriorated in the photoconductive properties by moisture, contaminants or scratch in the atmosphere. Since they are absorbed by the film 321 which is deteriorated in the photoconductive properties when the intensity of light which contributes largely to the increase in the conductivity is large in the conventional one, the increase in the conductivity is difficult, but according to this structure, it is not contacted with the atmospheric air when the light intensity is large. Accordingly, they are absorbed to the film 32 which is disposed in the vicinity of the substrate 31 which maintains good photoconductivity, thereby enabling to increase the conductivity. |
