发明名称 TRANSFER FOR USE IN TRANSMITTING WORKS
摘要 A transfer for transmitting a substrate is provided to rotate easily a substrate of loading state by improving a structure thereof. A lower plate(20) is installed on a rail of a frame. An upper plate(22) is installed on the lower plate. A substrate is loaded on the upper plate. A connective member is used for connecting rotatably the upper plate with the lower plate. A rotation limitation unit limits a turning radius of the upper plate within a predetermined range. The rotation limitation unit includes a first and second buffering parts formed on the lower plate, and a plurality of stoppers(S1,S2,S3) for limiting the rotation of the upper plate within a predetermined range.
申请公布号 KR100674882(B1) 申请公布日期 2007.01.29
申请号 KR20050100238 申请日期 2005.10.24
申请人 DMS CO., LTD. 发明人 CHOI, MAN SOO;KIM, JEONG CHOL;PARK, HO YOUN
分类号 H01L21/68;G02F1/13;H01L21/00 主分类号 H01L21/68
代理机构 代理人
主权项
地址