发明名称 |
TRANSFER FOR USE IN TRANSMITTING WORKS |
摘要 |
A transfer for transmitting a substrate is provided to rotate easily a substrate of loading state by improving a structure thereof. A lower plate(20) is installed on a rail of a frame. An upper plate(22) is installed on the lower plate. A substrate is loaded on the upper plate. A connective member is used for connecting rotatably the upper plate with the lower plate. A rotation limitation unit limits a turning radius of the upper plate within a predetermined range. The rotation limitation unit includes a first and second buffering parts formed on the lower plate, and a plurality of stoppers(S1,S2,S3) for limiting the rotation of the upper plate within a predetermined range.
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申请公布号 |
KR100674882(B1) |
申请公布日期 |
2007.01.29 |
申请号 |
KR20050100238 |
申请日期 |
2005.10.24 |
申请人 |
DMS CO., LTD. |
发明人 |
CHOI, MAN SOO;KIM, JEONG CHOL;PARK, HO YOUN |
分类号 |
H01L21/68;G02F1/13;H01L21/00 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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