METHOD OF AND APPARATUS FOR MINIMIZING PLASMA INSTABILITY IN AN RF PROCESSOR,申请号KR20007007335-传众专利搜索

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发明名称	METHOD OF AND APPARATUS FOR MINIMIZING PLASMA INSTABILITY IN AN RF PROCESSOR
摘要
申请公布号	KR100690223(B1)	申请公布日期	2007.03.12
申请号	KR20007007335	申请日期	2000.06.30
申请人		发明人
分类号	H01L21/3065	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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