ATMOSPHERIC PRESSURE PLASMA DEVICE WITH SURFACE DIELECTRIC BARRIER DISCHARGE WITH GAS FLOW GUIDE

摘要

The present invention relates to a dielectric barrier discharge atmospheric pressure plasma device using surface discharge and a gas guide pipe in order to improve plasma generation efficiency by using the gas guide pipe which generates plasma by using surface discharge and guides the flow of ambient gas. The dielectric barrier discharge atmospheric pressure plasma device includes a main body which has a discharge space where the progressing path of gas for generating the plasma in a first direction is formed; the gas guide pipe which crosses the discharge space in a second direction vertical to the first direction, selects a space where discharge is generated, and controls the flow of radicals and excited species; and a surface discharge plasma generation device.