PROCESS FOR PRODUCING SUPERFICIAL PILING-UP DEFECTS IN SEMICONDUCTOR WAFERS,申请号EP19800103784-传众专利搜索

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发明名称	PROCESS FOR PRODUCING SUPERFICIAL PILING-UP DEFECTS IN SEMICONDUCTOR WAFERS
摘要
申请公布号	EP0022960(B1)	申请公布日期	1983.09.21
申请号	EP19800103784	申请日期	1980.07.03
申请人	WACKER-CHEMITRONIC GESELLSCHAFT FUR ELEKTRONIK-GRUNDSTOFFE MBH	发明人	LAMPERT, INGOLF;WAHLICH, REINHOLD
分类号	B24B31/00;H01L21/304;H01L21/322;(IPC1-7):H01L21/30;H01L21/32	主分类号	B24B31/00
代理机构		代理人
主权项
地址

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