发明名称 FORMATION OF SINGLE CRYSTAL FILM ON AMORPHOUS SUBSTRATE
摘要 The invention is a method for producing a thin film semi-conductor material on an amorphous substrate (10) having a predetermined crystallographic orientation. The method includes forming a plurality of crystalline material islands (14) on the surface (18) of an amorphous substrate (10), forming a wall (20) around each island (14) of crystalline material with a material (16) having a higher melting temperature, then laser melting the crystalline material to promote the predetermined crystallographic orientation upon cooling. The walls (20) confine the thin layer of crystalline material (16) during laser melting, thereby preserving the straight edges and square corners necessary to promote the formation of the preferred crystallographic orientation upon cooling such as the (100) orientation of silicon.
申请公布号 JPS58151390(A) 申请公布日期 1983.09.08
申请号 JP19830022995 申请日期 1983.02.16
申请人 BENDIX CORP:THE 发明人 JIYOOJI KABURIERU GETSUTSU
分类号 C30B13/06;C30B1/08;C30B11/00;C30B13/14;H01L21/02;H01L21/20;H01L27/12 主分类号 C30B13/06
代理机构 代理人
主权项
地址