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发明名称
摘要
申请公布号
JPS5840813(B2)
申请公布日期
1983.09.08
申请号
JP19760034514
申请日期
1976.03.31
申请人
HITACHI LTD
发明人
TOMITA YOSHIFUMI;TAKEMOTO TAKEO
分类号
H01J9/39;H01J9/26;H01J29/86
主分类号
H01J9/39
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代理人
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