发明名称 POSITIVE TYPE PHOTOSENSITIVE COMPOSITION
摘要 PURPOSE:To increase the sensitivity of a compound contg. a quinonediazido group, by using a specified heterocyclic compound contg. nitrogen as a sensitizer. CONSTITUTION:The sensitivity of a photosensitive composition is remarkably increased by combinedly using a compound contg. a quinonediazido group as a photosensitive substance and at least 1 kind of sensitizer for the compound selected from pyrrolidone, oxyindole, imidazolidone, benzimidazolinone, imidazolidinethione, oxazolidone, benzoxazolinone, isoindolinone, thioindole, pyrazolone, isatin, succinic acid imide, thiazolidinedione, rhodanine, oxazolidinedione, glutaric acid imide, piperidone and derivs. thereof.
申请公布号 JPS58149042(A) 申请公布日期 1983.09.05
申请号 JP19820032926 申请日期 1982.03.02
申请人 TOUKIYOU OUKA KOGYO KK 发明人 YAMAMOTO CHIYOU;NAKANE HISASHI;YOKOTA AKIRA;KOMINE TAKASHI;HASHIMOTO KOUICHIROU;TODA SHIYOUZOU
分类号 G03C1/72;G03F7/022;H01L21/027 主分类号 G03C1/72
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