| 摘要 |
PURPOSE:To allow stable binding with a membrane not being broken due to migration by depositing a metal with good electrical conductivity in a vapor phase to form the membrane on smooth surfaces facing each other of an electric vibrator, then by soldering the vapor deposition membrane to a nozzle plate to bind them. CONSTITUTION:Vapor deposition membranes 6a, 6b are formed on smooth surfaces facing each other of an electric vibrator 1, and the membrane 6a is soldered with a nozzle plate 3 through solder 4 for binding. The electric vibrator 1 is made of ceramic and is formed in a ring with an outer diameter of about 10phimm., an aperture diameter of about 35mm., and a thickness of about 10mm., and the membranes 6a, 6b consist of the first layer deposition membrane made of chromium or nickel and the second layer deposition membrane made of copper, gold, brass, or nickel silver, and a metal membrane is formed by use of the vacuum deposition method. Accordingly, the membranes 6a, 6b are formed on the smooth surface of the electric vibrator 1, thereby the membranes are not broken due to migration during the soldering, thus allowing stable binding. |
