发明名称 |
Gas friction vacuum meter and method of making measuring body |
摘要 |
A rotary measuring body for a gas-friction vacuum meter has its surface formed with a macroscopic roughness which provides a gas-friction coefficient minimally affected by the microscopic roughness of the surface. As a result, the output signal and sensitivity of the vacuum meter is high and is less susceptible to change as a result of surface corrosion.
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申请公布号 |
US4395914(A) |
申请公布日期 |
1983.08.02 |
申请号 |
US19810263563 |
申请日期 |
1981.05.14 |
申请人 |
KERNFORSCHUNGSANLAGE JUELICH GMBH |
发明人 |
FREMEREY, JOHAN K.;LINDENAU, BERND |
分类号 |
G01L21/16;G01L21/24;(IPC1-7):G01L7/00 |
主分类号 |
G01L21/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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