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发明名称
摘要
申请公布号	FR2449883(B1)	申请公布日期	1983.07.29
申请号	FR19800003715	申请日期	1980.02.20
申请人	HAJIME IND LTD	发明人
分类号	G01B11/24;G01N21/956;G03F1/00;G06T1/00;(IPC1-7):G01N21/88;H01L21/66;H01L21/70	主分类号	G01B11/24
代理机构		代理人
主权项
地址

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