| 摘要 |
PURPOSE:To produce a thin film magnetic head with high yield, by providing a groove fill with a nonmagnetic matter at a part of the surface touching a magnetic layer of a nonmagetic substrate and cutting a V-shaped groove with a depth reaching the nonmagnetic matter to divide the magnetic layer into two parts. CONSTITUTION:A groove 10 is formed to a surface of a substrate 1 made of glass or ceramic, and then a layer of a nonmagnetic matter 11 of Al2O3, etc. is formed on the substrate 1 by a sputtering process, etc. with such a thickness that fills the groove 10. The layer of the matter 11 is polished, and a magnetic layer 2 is formed on the matter 11. Then a V-shaped groove 6 is formed with a depth reaching the matter 11 to divide the layer 2 into two parts. A nonmagnetic layer 3 and a magnetic layer 4 are formed on the groove 6, and a groove is formed to divide the layer 4 into two parts. A protecting nonmagnetic layer 5 is formed on the layer 4. Thus a thin film magnetic head is obtained. When the groove 6 is formed, no damage is given to the substrate 1 although the matter 11 has breaks or cracks. This improves the yield of production. |
