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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS58114423(A)
申请公布日期
1983.07.07
申请号
JP19810210862
申请日期
1981.12.28
申请人
FUJITSU KK
发明人
SHIBATOMI AKIHIRO;OZEKI MASASHI
分类号
H01L21/31;H01L21/268
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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