摘要 |
PURPOSE:To obtain an inexpensive image sensor with high performance, by approaching and opposing a sensor part, and an illumination part to each other on the same substrate by a thin film element. CONSTITUTION:A sensor part A is provided by overlapping a common electrode 14, an a-Si12, and an individual transparent electrode 13 on a glass plate 11 having a thickness of 1mm or less, and an illumination part B is provided by overlapping an electrode 16, an EL element 17, and a transparent electrode 18 on the same plate, then, they are coated with an Si N film. The illumination part B, and the sensor part A are arranged in parallel forming an elongate shape in a main scanning direction, and approaching to each other. By constituting a device in such way, quite a thin image sensor can be obtained, and uniform light emitting intensity distribution can be obtained over the whole area, thereby, a document 19 can be illiminated by uniform illuminance, and since a distance between a light source, and the document is only several mu, the illuminance at the document is remarkably increased, thereby, a sensor output is increased and a good S/H can be obtained. |