Adherent perfluorinated layers

摘要

A method for forming a perfluorinated polymeric film having improved adhesion to a substrate surface whereby the substrate surface is initially glow discharged in the presence of nitrogen, and then a polymeric film is deposited on the substrate surface by subjecting the surface to a glow discharge in the presence of a precursor comprising a compound selected from the group consisting of perfluorocycloalkanes, perfluorocycloolefins and perfluoroalkyl-substituted derivatives thereof.