| 摘要 |
PURPOSE:To obtain an electrophotographic receptor having <=12mum film thickness, sufficient acceptance potential, and superior stability, by forming an amorphous photoconductive layer, using a mixture of silicon-type gas and gaseous hydrocarbon and a gas contg. an oxygen atom. CONSTITUTION:For example, hydrogen, silane, and methane are introduced through a gas introduction tube 1, and oxygen through a tube 10 into a vacuum chamber 2, maintained at 0.1-10 Torr inside pressure, and 50-1kW high frequency waves are applied between a glow discharge electrode 3 and an electrode 5 serving also as a base holder to cause glow discharge. This decomposes the introduced gases and deposits amorphous silicon carbide onto the base 4 serviceable as an electrophotographic receptor. As the base gas to be used is hydrogen, helium, neon, argon, etc., as the hydrocarbon gas, methane, ethylene, propylene, etc., and as the silicon type gas, silane, dichlorosilane, tetrafluorosilane, etc., and as the oxygen type gas, carbon monooxide, carbon dioxide, etc. are used. |
