| 摘要 |
PURPOSE:To form a magnetic film of iron nitride having good magnetic characteristics and including a little impurity such as carbon without damaging a substrate by decomposing a reactive gas consisting of a gaseous compound including iron atoms and a gaseous compound including nitrogen atoms by means of the light energy of an ultraviolet area and utilizing a plasma of a reducible gas such as hydrogen to cause a reaction at low temperature for forming the film. CONSTITUTION:A laser beam emitted by a laser 28 decomposes iron pentacarbonyl and ammonium by photo reaction to form a film of iron nitride on a substrate 21. During this reaction, ions including carbon are produced as side reaction by decomposition of iron pentacarbonyl and by this reaction, carbon is mixed into the film of iron nitride. For preventing that, a hydrogen plasma is produced from the hydrogen supplied from a hydrogen inlet pipe 8 by a plasma generator 12 and this plasma is introduced into a reactor 18. This hydrogen plasma reacts with the ions including carbon which is obtained as a by-product by decomposition of iron pentacarbonyl, and inclusion of carbon in the formed film can be prevented.
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