| 摘要 |
PURPOSE:To analyze the defectives with high efficiency by loading a plurality of samples to be tested onto the outer circumferential surface of an annular stage, continuously turning the stage and moving the samples in the parallel direction. CONSTITUTION:The samples to be tested 2 are fitted to a plurality of drive circuits 6 disposed into the outer circumference 7 in the hollow stage 1. Conductor rings 4 and photodiodes 5 are severally arranged to a side wall 8 by plural numbers, and all connected to the circuits 6. Sliding contactors are set up to the rings 4. When optical pulses are applied to the diodes 5, they are changed into electric signals and transmitted to the circuits 6, and the operation of the samples 2 is changed over. The stage 1 is turned through a shaft 9 by means of the driving device of the stage, the samples 2 are advanced at predetermined speed, and the surfaces of the samples 2 are scanned by means of electron beams. Accordingly, the defective are analyzed with high efficiency. |
