| 摘要 |
PURPOSE:To easily manufacture fibrous crystals of high purity silicon nitride with superior heat resistance, heat insulating property, etc. by thermally decomposing a silane compound contg. nitrogen in a hydrogen-base atmosphere. CONSTITUTION:A silane compound contg. nitrogen such as Si(NH)2, silicon diimide, Si2N3H or amorphous Si3N4 powder is themally decomposed at a high temp. in a flow of a gas contg. >=80vol% hydrogen. Fibrous crystals of high purity Si3N4 can be manufactured in a high yield. |
