OPTICAL CHARACTERISTIC MEASURING APPARATUS FOR OPTICAL SYSTEM

摘要

PURPOSE:To measure the optical characteristics of an optical system to be inspected by detecting such a light source pattern that light from a surface light source comprising an array of light emitting elements passes through a pattern of two parallel lines on a mask to form beams parallel to the optical axis with the optical system. CONSTITUTION:Light PL from a specified position on a surface light source S comprising a two-dimensional array of light emitting elements S1-Sn passes through a parallel line pattern L On a mask MA to form beams parallel to the optical axis O through a lens T to be inspected so that it will be detected with a light detecting element DT passing through a pin hole PH arranged at the focus position of a condenser lens CL. Such beams is contained in a group of straight lines passing through a point on the pattern L from the focus of the lens to be inspected or focal lines F1 and F2. A pattern L' on the light source S corresponding to beam meeting this requirement is detected through a luminous scanning signal of the light source S and the light element DT to determine optical characteristics of the lens T.