| 摘要 |
PURPOSE:To converge plasma beams to a hearth simultaneously with bending of the same and to decrease the losses of plasma on the wall of a vacuum vessel by disposing magnets under the hearth and near the wall of said vessel. CONSTITUTION:Plasma beams 14 are formed in a vacuum vessel 6 by an introducing port 1 for gaseous Ar, a new type cathode 2, the 1st intermediate electrode and an annular permanent magnet 3, the 2nd intermediate electrode, an air core electromagnetic coil 4, and a discharge electric power source 5. Here, if a powerful barlike permanent magnet 8 is placed under an anode 7 serving also as a hearth and a strong magnetic field is created locally by the same, the beams 14 can be bent and at the same time the beams can be converged to the hearth 7. Permanent magnets 13 are disposed near the wall of the vessel to create locally strong magnetic fields, whereby the losses of plasma on the wall of the vessel are reduced. |
