发明名称 MOLECULAR BEAM CRYSTAL GROWING APPARATUS
摘要 PURPOSE:To check damage to the minimum extent, by a method wherein a leakage detecting electrode is provided on the outer wall of a clusible for detecting the leakage of raw materials. CONSTITUTION:A clusible 1 is provided with a thermocouple 2, tungsten (W) heaters and their insulating glasses 3, leads of the heaters, tantalum (Ta) reflector 5 on the outer periphery thereof. A pair of comb-shaped electrodes 6 made of Ta for detecting leakage are directly fixed to the outer walls of the clusible 1 so that a pair of teeth of said pair of electrodes are opposedly engaged, but not touching with each other. Said detector electrodes are connected to lead wires 7. When the clusible 1 is cracked, and raw material Al is flown out, Al is plugged in gaps between the teeth of the opposed pair of detector electrodes, and they are short-circuited. Thus, the damage of the clusible 1 is detected through the lead wires 7.
申请公布号 JPS5871618(A) 申请公布日期 1983.04.28
申请号 JP19810169760 申请日期 1981.10.23
申请人 FUJITSU KK 发明人 FUJII TOSHIO
分类号 H01L21/26;H01L21/203 主分类号 H01L21/26
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