| 摘要 |
PURPOSE:To efficiently obtain a laser beam having a high space uniformity and large crosssectional shape by spark discharging between a pre-ionizing electrode buried through an insulator in one of main discharging electrodes and the main discharging electrode to preliminarily ionize it. CONSTITUTION:When a high voltage is applied between a power supply paths 13 and 18, a spark discharge occurs between pre-ionizing electrodes 16 and 17 and a main discharge electrode 12, a current flows in a passage of the path 13, a peaking capacitor 14, a main discharge electrode 12, the electrodes 16, 17 and a power supply path 18 to charge a peaking capacitor 14. A laser gas between the electrodes 11 and 12 is sufficiently pre-ionized, thereby obtaining uniform electron density of 10<7> (cm<-3>) or more. Thus, since a uniform glow discharge can be performed, an arc discharge is reduced to enhance a laser oscillation efficiency, the space uniformity of a laser beam crosssectional strength distribution is improved, and a laser output having large sectional size is obtained. |
