| 摘要 |
PURPOSE:To economically manufacture multinozzle plates of high precision by a method wherein plural lines of V groove are formed in a single crystal plate by anisotropically etching it, and the plate is cut at its center, the two plates thus obtained are pasted together so that V grooves are arranged to face each other and the pasted plate is sliced in the direction perpendicular to the V grooves. CONSTITUTION:A base plate 10 having plural lines of V grooves, each has two wall surfaces composed of a surface (100) and another surface (111), is formed by anisotropically etching a single crystal plate (Example; Si semiconductor plate) and this is divided into two sections by cutting it in the direction perpendicular to V grooves. The two base plates thus obtained are pasted together by causing V grooves to face each other, and multinozzle plates 20 of high precision are formed by slicing the pasted plate in the direction perpendicular to V grooves. |
