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发明名称
摘要
申请公布号
JPS5814750(B2)
申请公布日期
1983.03.22
申请号
JP19780040118
申请日期
1978.04.05
申请人
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
发明人
MOCHIZUKI TOORU;TAKEUCHI YUKIO
分类号
H01L21/3205;H01L21/306;H01L21/339;H01L23/52;H01L29/762
主分类号
H01L21/3205
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