| 摘要 |
PURPOSE:To speed up measurement time by constituting the prober section with a wafer support section and a marker section and providing the support section with a first stage and a second stage that is movable in XYZ directions and operating the second stage based on the information obtained by measuring the pellet of a wafer with a probe. CONSTITUTION:A prober section 11 is constituted with a wafer support section 11a that supports at a specified position according to a pellet demarcation line of a pellet that is provided on a wafer and a marker section 11b. This support section 11a is constituted with a first stage on which the wafer is loaded and a second stage placed on them and capable to be adjusted in XYZ directions. A probe is made to contact successively with the measurement pads, following a specified travel route, and the output of the probe is supplied to a measurement device 12. When the measurement is finished, the wafer is transferred and only the second stage is operated in XYZ directions by the outputs of a first memory section 15 and a second memory section that are connected to the measurement device 12 to measure continuously the pellets provided on the wafer. |
