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发明名称
CHEMICAL VAPOR GROWTH METHOD
摘要
申请公布号
JPS583633(A)
申请公布日期
1983.01.10
申请号
JP19810101894
申请日期
1981.06.30
申请人
FUJITSU KK
发明人
IKEDA MASUMI;ANZAI OSAMU
分类号
C30B25/02;B01J19/00;C23C16/44;C23C16/455;C30B25/00;H01L21/02;H01L21/316
主分类号
C30B25/02
代理机构
代理人
主权项
地址
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