METHOD FOR EVALUATING FILM QUALITY OF SILICON NITRIDE FILM,申请号JP19910096572-传众专利搜索

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发明名称	METHOD FOR EVALUATING FILM QUALITY OF SILICON NITRIDE FILM
摘要
申请公布号	JPH04326052(A)	申请公布日期	1992.11.16
申请号	JP19910096572	申请日期	1991.04.26
申请人	OKI ELECTRIC IND CO LTD	发明人	WATANABE NOBUAKI
分类号	C23C16/52;G01N24/10	主分类号	C23C16/52
代理机构		代理人
主权项
地址

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