| 摘要 |
PURPOSE:To transfer a wafer from a carrier to a quartz board automatically, by providing a guide to guide the wafer and a folding unit to have a block in which a rotating rod is buried at its top. CONSTITUTION:A wafer in a carrier holder 18 is guided by comb guides 20a, 20b at the top and bottom of frame retainer 19, and drops naturally to a quartz board, as a carrier holder 18 inclines. A comb guide 45 receives it at the top of pusher 41. The wafer received at the guide 45 is mounted on a folding unit 34. At the same time, its outer circle rotates in contact with a folding shaft 35. Each wafer is put in order on the condition the folded part is placed downward. |
