发明名称 PELLET BONDER
摘要 PURPOSE:To keep the fitting position of a pellet always constant by a method wherein the deviation from the standard potential is obtained by recognizing the cavity position of a package base automatically and the change of the scrub center position of the pellet is controlled in accordance with the deviation. CONSTITUTION:A supported part 8 of a forward-backward lever 5 is supported by an eccentric shaft 25. A detector 28 which detects both end edges of the forward and backward directions of a bonding surface formed on a package base B is provided above a heater 24 on which the base B is set. A controlling part 29 is provided between a pulse motor and the detector 28. With this constitution, the deviation detected by the detector 28 is computed by the controlling part 29 and changes the pulse motor 27 to the required rotating position and gives a fine change to the supported part 8 of the lever 5.
申请公布号 JPS57178333(A) 申请公布日期 1982.11.02
申请号 JP19810062475 申请日期 1981.04.27
申请人 HITACHI SEISAKUSHO KK 发明人 OZAWA MASAKAZU;SUGIMOTO TATSUO
分类号 H01L21/52;H01L21/58;(IPC1-7):01L21/58 主分类号 H01L21/52
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