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发明名称
FORMATION OF SIMULATED ETCHING PATTERN
摘要
申请公布号
JPS57177973(A)
申请公布日期
1982.11.01
申请号
JP19810062353
申请日期
1981.04.27
申请人
TOYO INK SEIZO KK
发明人
FUKUMURA NORIO;AKIYAMA MASAMICHI
分类号
C23F1/00;C23C14/04
主分类号
C23F1/00
代理机构
代理人
主权项
地址
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