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发明名称
摘要
申请公布号
JPS57168014(U)
申请公布日期
1982.10.22
申请号
JP19810055142U
申请日期
1981.04.16
申请人
发明人
分类号
G01D7/00;G09F13/20;G12B11/00;G12B11/04;H01L33/58;H05K7/12;(IPC1-7):G01D7/00
主分类号
G01D7/00
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代理人
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