| 摘要 |
PURPOSE:To prevent the disconnection of a wire by bonding the wire so that the length of the wire bonded is extended outside the range of resonance of ultrasonic vibration. CONSTITUTION:A sample is supplied to a feeding section 2 from a loader section 1, forwarded to a sample base plate 3 and positioned. The displacement of the sample is detected by means of a camera at the upper section of a bonding head section 4, and the position of bodning is corrected. An XY driving section 5 and the sample base plate 3 are driven by these data, and a tool 7 held by a horn 6 is moved to the first bonding section. The bonding head section 4 is driven, the tool 7 is dropped, and the first bonding is conducted. The second and succeeding bonding are conducted similarly, but when it is decided that the quantity of the XY driving section 5 moved, the length of the wire, is within the range of resonance of ultrasonic vibration at that time the tool 7 is further guided only by quantity previously set, the length of the wire is lengthened, and the wire is bonded. |
