| 摘要 |
PURPOSE:To enable and stabilization of a glow discharge and the reduction in the fluid loss by providing a rectifying plate for rectifying the flow to the inflow side passage of a laser gas of a gas circulation laser. CONSTITUTION:A heat exchanger 9 and a blower 3 are provided in the passage 1 of a gas circulation type laser having a metallic anode plate 4, a cathode 5, a stabilizing resistor 6 and a power source 7, a rectifying plate 11 such as a rectifying lattice of honeycomb structure for rectifying the flow with a plane surface or curved surface along the flowing direction of a laser gas is provided, thereby stabilizing a glow discharge 8. Thus, the velocity distribution of the laser gas can be made uniform, ad the fluid loss can be reduced, thereby obtaining the stable glow discharge even if small sized blower of low static pressure is used. |
