发明名称 TESTER FOR SEMICONDUCTOR SUBSTRATE
摘要 PURPOSE:To conduct positive OF alignment by symmetrically arranging guides outside two parallel conveyor belts and projecting a shaft at the approximately center between the belts and a round bar where deviated by approximately half of the OF dimensions of a substrate from the shaft. CONSTITUTION:When the substrate 1 contacts with the shaft 3 by the belts 2, revolution is started in the B direction, and the substrate starts its revolution in the C direction. When the revolution of the substrate advances and an OF1a is positioned where contacting with the revolution stopping round bar 4 separated by approximately half of the OF dimensions from the shaft 3, the revolution of the substrate 1 is stopped in spite of the frictional force of the shaft 3. Even when revolution is continued, the substrate 1 is not subject to revolving torque, the OF direction is fixed only by frictional force in the A direction by the belts 2, and revolution is stopped. The guides 5 stop the motion in the D cirection of the substrate 1. According to this constitution, the OF alignment can be conducted positively by utilizing the carrying force of the conveyor belts, and the tester is advantageous for the test of the substrate.
申请公布号 JPS57149747(A) 申请公布日期 1982.09.16
申请号 JP19810035745 申请日期 1981.03.12
申请人 KIYUUSHIYUU NIPPON DENKI KK 发明人 TAGUCHI YUKIHISA
分类号 H01L21/68;G01R31/28 主分类号 H01L21/68
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