| 摘要 |
PURPOSE:To manufacture the light weight solar cell at low cost, and to form the flexible solar cell, secular degradation thereof is little, by shaping an electrode film through an ion plating method. CONSTITUTION:The electrode film 12 in titanium, etc. is deposited onto a substrate 11 made of a high molecular material (such as polyimide) through the ion plating method. An amorphous silicon (a-Si) layer 13 is formed onto the electrode film 12. The a-Si semiconductor layer 13 is composed of the three layers of an N type - an I type - a P type from the titanium electrode 12 side. A transparent electrode film 14 transmitting sunrays 15 such as tin oxide indium is shaped through a vacuum evaporation method. Accordingly, the titanium electrode 12 is not exfoliated from the polyimide substrate 11, and the degradation of the characteristics of the solar cell is decreased. |
