| 摘要 |
PURPOSE:To increase the manufacturing efficiency, by applying a high DC voltage between partial resonator electrodes and polarizing a piezoelectric plate, after forming the partial resonator electrodes opposing to the thin piezoelectric plate and clipping the piezoelectric plate covering the electrodes with virtual electrode plates. CONSTITUTION:Vibrating electrodes 11 opposing to each other are formed by 1-5mu thick with printing at the center of both major planes of a thin ceramic plate 1 having 0.5mm. thickness, the ceramic plate 1 is clipped with simulated electrode plates 13 made of conductive silicone rubber by covering both the entire major surfaces of the ceramic plate 1 covering the electrodes 11 and the plate 1 is immersed in silicone oil. Polarization 5 is made to the ceramic plate 1 by applying about 5kV/mm. of DC high voltage in the silicone oil between the simulated electrodes 13. Thereafter, an energy enclosing type ceramic resonator is manufactured by removing the electrodes 13. Thus, without the need for polarized silver electrodes and also melting and removing process for the silver electrode, etching solution is not necessary and the manufacturing process can be simplified. |
