| 摘要 |
PURPOSE:To simplify the position-adjusting between air tracks and a conveyed- object receiving device by changing the direction of transfer slightly. CONSTITUTION:When compressed air is jetted out from compressed-air jet ports 105, conveyed objects such as semiconductor wafers are conveyed from an air tranck 101 to an air track 103. When air tranck 101 and 103 are fitted with each other, the overlapping of their convex parts 106 and 104 are adjusted for adjusting the distance l between end faces of air tranks 101 and 103 freely. |
