| 摘要 |
PURPOSE:To reduce the total number of necessary pads for probing and to facilitate probing of a large-scale integrated circuit device by a method wherein integrated circuits for test having pads of plural number for probing are formed at the circumferential parts of the large-scale integrated circuit device, and probing is performed using the pads for probing. CONSTITUTION:Numerous pads 14 are provided adjacent to the respective sides of a square semiconductor substrate having four sides 12 of equal length, and the large-scale integrated circuit 13 is formed at the center part being connected thereto. The integrated circuits 16 for test to constitute multiplexers are formed at the circumferential parts adjacent to the large-scale integrated circuit 13. The pads 17 for probing (searching) being comparatively large and being fewer than the pads 14 of the large-scale integrated circuit 13 are provided to the integrated circuits 16 for test. Accordingly because probing can be performed using the pad 17 for searching of the remarkably few number, reduction of yield, etc., originated from inferior contact between the pads and probes can be prevented. |
