发明名称 LIGHT INTERFERENCE TYPE SENSOR
摘要 PURPOSE:To make physical quantity measurable with high accuracy by utilizing the monochromatic light emission characteristics of laser beam and its oscillation wavelength stability. CONSTITUTION:The forward path of parallel rays 2 passed through a shutter 10 from a half mirror 6 is focused by a lens 32 and is made incident to an optical fiber 33. While the rays 2 maintain a single mode in the fiber 33, they arrive at a sensor 34. The rays 2 arrive at a reflection mirror 35 in the medium of the sensor 34 in the single mode, and they are reflected there and are reflected by the half mirror 6 through the backward path of the rays 2, thereby forming a part of a rays 3. When the velocity of light in the medium of the sensor 34 changes with measuring physical quantity, the phase at which the backward path of the rays 2 is made incident to the half mirror 6 changes. From this change in the position, the measuring physical quantity applied to the sensor 34 is measured.
申请公布号 JPS57120803(A) 申请公布日期 1982.07.28
申请号 JP19810006513 申请日期 1981.01.21
申请人 TOKYO SHIBAURA DENKI KK 发明人 MATSUMOTO MITSUO
分类号 G01B9/02;G01B11/00;G01D5/353;G01H9/00 主分类号 G01B9/02
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