发明名称 MANUFACTURE OF QUARTZ OSCILLATOR
摘要 PURPOSE:To form an electrode film which has extremely superior adhesive strength by forming a titanium oxide film after quartz etching, by performing electroless plating, and peeling photoresist. CONSTITUTION:After quartz etching is performed by using photoresist 4 and a metallic film of chromium 2 and gold 3 as a mask, a film of titanium oxide 5 is formed over the entire surface and electroless plating is performed over the titanium oxide 5 on adequate conditions. Then, the photoresist 4 is peeled off to form a side-electrode film having superior adhesive strength on the side surface of a quartz oscillator. The thickness of the titanium oxide 5 is about 50- 1,000Angstrom , and that of electroless plating is about 50-10,000Angstrom .
申请公布号 JPS57119504(A) 申请公布日期 1982.07.26
申请号 JP19810004868 申请日期 1981.01.16
申请人 SUWA SEIKOSHA KK 发明人 TOGAWA EIJI
分类号 H03H9/00;H03H3/02;H03H9/125 主分类号 H03H9/00
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