摘要 |
PURPOSE:To form an electrode film which has extremely superior adhesive strength by forming a titanium oxide film after quartz etching, by performing electroless plating, and peeling photoresist. CONSTITUTION:After quartz etching is performed by using photoresist 4 and a metallic film of chromium 2 and gold 3 as a mask, a film of titanium oxide 5 is formed over the entire surface and electroless plating is performed over the titanium oxide 5 on adequate conditions. Then, the photoresist 4 is peeled off to form a side-electrode film having superior adhesive strength on the side surface of a quartz oscillator. The thickness of the titanium oxide 5 is about 50- 1,000Angstrom , and that of electroless plating is about 50-10,000Angstrom . |