发明名称 POSITIONING OF SEMICONDUCTOR WAFER
摘要 PURPOSE:To reduce the time necessary for positioning by using data from a circuit to add digitalized signal of each horizontal scanning, and a circuit to add some more horizontal scanning signals. CONSTITUTION:Scanning signals 6 to scan dicing lines and a comparator level signal 7 ar input to a comparator and a digital signal 8 are put into an adder 9 for each scanning line. Output signal of the adder 9 is read into a microcomputer. The center of dicing line is obtained by confirming whether or not the number of scanning lines are on the dicing line. The positioning in x or y directions are thus performed at a high speed.
申请公布号 JPS57117252(A) 申请公布日期 1982.07.21
申请号 JP19810002706 申请日期 1981.01.13
申请人 TOKYO SHIBAURA DENKI KK 发明人 SANO TETSUYA
分类号 H01L21/68;H01L21/301;H01L21/78 主分类号 H01L21/68
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