摘要 |
PURPOSE:To achieve high speed and high efficiency to a large signal charge, by lowering the channel potential of storage region of a signal charge from a signal input section to a split section. CONSTITUTION:The device is provided with a charge storage section having a storage electrode provided via an isolation film 29 on a conduction type semiconductor substrate 21, charge input sections 24a, 24b to inject signal charge to storage section, and a charge transfer type split section which splits 26 the signal charge stored in the storage section to a specified unit charge bundle, converts it to a time series quantized signal charge bundle train and transfers 27, 28 it. Further, the channel potential of the storage section has a specified slope 31 from the region near the input section to the direction toward the region near the split section, and the center of gravity of signal charge of the storage section is moved to the split section accompanied with the reduction in the charge. |