| 摘要 |
PURPOSE:To realize a force detector which can eliminate the fluctuation of the zero point at a mobile part regardless of the change of the posture, by compensating the effect of the gravity via a combined matter of a flexible part and a weight of a detecting element for compensation of a displacement or a distortion which is caused. CONSTITUTION:The outer fringe part 2' of a detector diaphragm 2 of a force detector protrudes into an outside circular chamber 20 and is coupled with a weight 21 to form an electrostatic capacity type compensating displacement detecting element 17 along with compensating fixed electrodes 26 and 27 plus compensating mobile electrodes 24 and 25. In the same way, the detector capacities are connected in series and in an X shape. Accordingly the variation of the electrostatic capacity which is caused by a displacement of a coupling rod 11, etc. due to the gravity and in accordance with the change of posture of the force detector can be eliminated via the element 17. As a result, the fluctuation of the zero point which is caused by the gravity when the posture is changed can be substantially eliminated by the force detector. |
