| 摘要 |
PURPOSE:To enhance efficiency of test work of semiconductor substrate by a method wherein magnified pictures of two points on the surface of the semiconductor substrate are formed at the same time in the same range of vision. CONSTITUTION:Light discharged from a source of light 1 is irradiated to the semiconductor substrate 11 through a half mirror 4, prisms 5-8, lenses 9, 10. Reflected light forms dividedly magnified pictures of the plural places of the substrate 11 in the same range of vision through the lenses 9, 10, the prisms 5-8, the half mirror 4 again and a lens 3. |
