| 摘要 |
PURPOSE:To obtain stable performance, by forming a pattern to a prescribed shape having a heater part by a selected material layer, and after that, etching a substrate from its exposed surface side, forming a recessed part on the substrate, and forming a bridging structure. CONSTITUTION:On a substrate 1, the first insulating layer 2, a ground layer 3, a select material layer 4 and the second insulating layer 5 form a film in order by a well-known film forming technique. Subsequently, sputter etching is performed by using a pattern 5a of the second insulating layer 5 as a mask, and a selected material layer pattern 4a and a ground layer pattern 3a are formed. As a result, a heater part 7 having the selected material layer 4a is formed. After that, etching treatment is performed to the substrate 1 from its exposed surface, a recessed part 10 is formed on the substrate 1, and a bridging structure is formed. According to such a method, it is possible to easily manufacture an electric heater which has a desired bridging structure and is capable to displaying stable performance. |
