摘要 |
<p>J. C. Greenwood 37 (Rev) TRANSDUCER AND METHOD OF MAKING THE SAME A silicon transducer including a silicon frame with one or more lands extending from a diaphragm or the like. The lands are interconnected by two thin strips formed integrally with the lands. The strips are essentially the transducer. The transducer is constructed by etching a boron doped wafer with a mixture of catechol, ethylene diamine and water.</p> |