发明名称 SILICON TRANSDUCER
摘要 <p>J. C. Greenwood 37 (Rev) TRANSDUCER AND METHOD OF MAKING THE SAME A silicon transducer including a silicon frame with one or more lands extending from a diaphragm or the like. The lands are interconnected by two thin strips formed integrally with the lands. The strips are essentially the transducer. The transducer is constructed by etching a boron doped wafer with a mixture of catechol, ethylene diamine and water.</p>
申请公布号 CA1125049(A) 申请公布日期 1982.06.08
申请号 CA19790328674 申请日期 1979.05.30
申请人 ITT INDUSTRIES INC. 发明人 GREENWOOD, JOHN C.
分类号 G01L9/00;H01L29/84;H01L41/00;H04R17/10;(IPC1-7):01L7/08 主分类号 G01L9/00
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